Plasma-Therm strengthens its presence in Europe to collaborate


Grenoble-based cleanroom manufacturing and demonstration facility offers customers product and application development, regional field service and technical support for advanced etching, deposition, RTP manufacturing processes and plasma cutting

Comprehensive regionalized support facilitates multi-system orders for two European customers of the company’s newly redesigned Heatpulse RTP system

MUNICH, Germany, Nov. 15, 2022 (GLOBE NEWSWIRE) — SEMICON Europe Plasma-Therm, a leading manufacturer of plasma processing equipment for the semiconductor and compound semiconductor markets, today announced that its Grenoble site will serve as a regional headquarters to support customers located in the markets. from Central Europe, the Middle East and North Africa (EMEA) focused on the development of energy, wireless, memory, sensor and MEMS, and other advanced microelectronic devices. The company’s European facility, equipped with advanced R&D, manufacturing and demonstration clean rooms, is ready to support the development of new applications and products with customers and strategic partners in the region.

Plasma-Therm’s focus on process solutions and customer satisfaction has resulted in the recent awarding of several orders for its newly redesigned Heatpulse rapid thermal processing (RTP) platform (launched earlier this year), about to be delivered to two major European customers next month. Heatpulse RTP was selected for its new, best-in-class control system software, improved robotics, and ability to scale to a variety of substrates up to 200mm, including silicon, arsenide gallium, silicon carbide and other compound materials. The new system design helps existing Heatpulse customers mitigate supply chain and obsolescence issues with their current systems. Refurbishment options for older systems are also available.

“Expanding our presence in Europe is part of our long-term strategic growth plan to deliver best-in-class customer experience and personalized technology fulfillment solutions to customers in the region,” said Jim Garstka, vice president of sales. and business development at Plasma-Therm. “We expect EMEA to continue to be a strong growth market for us, driven by demand for advanced compound semiconductors and silicon devices used in automotive, wireless, IoT, AR/VR and other end-use applications.”

“Being able to rapidly deploy our highly specialized engineering, sales and support teams and offer flexible solutions enables our customers to accelerate their devices to market,” said Yannick Pilloux, Executive Director of Sales at Plasma-Therm, EMEA. “We expect our new Heatpulse system to continue to see the market with improved reliability and performance, along with the assurance of readily available spare parts and maximum tool availability in the factory.”

About Heatpulse RTP

The newly redesigned Heatpulse RTP platform processes substrates up to 200mm in diameter for a wide variety of materials including silicon, gallium arsenide, silicon carbide and other compound semiconductors. Offering greater flexibility to accommodate multiple wafer sizes, the new platform features improved robotics and Plasma-Therm’s Cortex® best-in-class process monitoring and control software. The company also offers easy-to-implement conversion kits to upgrade currently installed systems, eliminating complicated hardware modifications to ensure full compatibility with existing processes. For more information on Heatpulse RTP system offerings, please visit our website

About Cortex Process Control Software

Cortex is Plasma-Therm’s advanced process control software offering a seamless and intuitive user interface for process development, operations, and maintenance across all plasma etching, deposition, RTP, and cutting product lines. The software enables increased tool reliability and optimization with the ability to develop and maintain process recipes, safe and secure maintenance, and real-time data analysis for fine-tuning and performance repeatability. Cortex also features built-in endpoint detection for tighter process control using laser interferometry for accurate rate determination as well as optical emission spectrometry. All Cortex systems provide secure remote access for diagnostics and process support.

Plasma-Therm at SEMICON Europa 2022

Plasma-Therm is exhibiting at SEMICON Europa in Munich, Germany, November 15-18, 2022. Learn more about the company’s new Heatpulse RTP platform and other plasma etching, deposition and cutting offerings , please visit booth C1755 at the show. To arrange a product demonstration with a sales representative or technologist, please email

About Plasma-Therm
Plasma-Therm is a global manufacturer of advanced plasma processing equipment. Its tools and processes are used to meet manufacturing needs in etching, deposition, rapid heat treatment and plasma cutting technologies. The company serves the semiconductor and compound semiconductor industries in developing solutions for the wireless, power devices, MEMS, photonics, advanced packaging and data storage markets. With locations in North America, Europe and Asia-Pacific, Plasma-Therm meets the diverse needs of its customers with exceptional customer service. To learn more, visit

Contact Plasma-Therm:
Elisabeth Unger
Marketing Manager
+1.727.577.4999 ext. 1727

Media Contact:
Stephanie Quinn
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